Technology History | ASML — A Leaky Shed Beside Philips at Strijp-T
· 1984-4
Unreviewed contributionBy kevin · · Report an issue
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Technology History | ASML — A Leaky Shed Beside Philips at Strijp-T
kevin
People treat ASML as the Veldhoven campus that always sold an extreme-ultraviolet scanner no other house could build.
The first book was a joint venture in a prefab hut that leaked.
On 1 April 1984 Philips and Advanced Semiconductor Materials International opened ASM Lithography at Strijp-T in Eindhoven, next to Philips Industrial Electronics.
The mandate was to sell a wafer stepper Philips Research had already designed, the PAS 2000.
Forty-seven people signed on. The first rooms were construction cabins tied to the TQ building. A shipping container sat against the hut so rain would not fall on the desks.
The first machine was the size of a large refrigerator and listed at about one million guilders in 1984 money.
In 1985 the firm moved a few kilometres west into a purpose-built plant at Veldhoven. The PAS 2500 followed in 1986, with a new alignment method and a lens partnership with Carl Zeiss that still sits inside every scanner.
Philips later sold the shares. ASM stepped back. The hut did not become a museum.
The mechanism is still the first one.
A stepper that could print one layer after another on a silicon wafer let a foundry reuse the same tool for many chips. Whoever owned the tool owned the next node.
A visitor at Strijp-T still walks past the Philips brick that hid the cabin. The cabin is gone. The scanner outgrew the leak.
The leak is where the book started.
Photo: Eindhoven streetscape, Wikimedia Commons contributors, via Wikimedia Commons.
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