Technology History | Lam Research — The AutoEtch After Santa Clara
· 1980
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Technology History | Lam Research — The AutoEtch After Santa Clara
kevin
People treat Lam Research as a Fremont campus that always sold etch tools beside Applied Materials and Tokyo Electron.
The first company was a Santa Clara startup with one product idea.
In 1980 David K. Lam, a Chinese-born engineer who had worked at Xerox, Hewlett-Packard, and Texas Instruments, founded Lam Research in Santa Clara. He had seen at Hewlett-Packard that plasma etchers could not keep up with shrinking wafers. Robert Noyce reviewed the business plan and helped him raise the first money.
In 1981 the company shipped the AutoEtch 480, an automated polysilicon plasma etcher. The 80 in the model number was the founding year. The first system sold in January 1982. Roger Emerick became chief executive that year. The firm listed on Nasdaq as LRCX in May 1984.
Headquarters moved to Fremont in 1987. The present campus sits at 4650 Cushing Parkway. The public view is the parkway frontage and the pond beside the office buildings, not the clean-tool bays.
The mechanism is a single etch step made automatic. As line widths fell below two microns, a machine that could run without an operator standing over the chamber became the difference between a yield and a scrap wafer.
This pin is not Santa Clara. The founding rooms are gone. The campus that still carries the name is the Fremont lot taken in 1987.
Photo: public view of Fremont, California, via Wikimedia Commons.
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